Data from "Deep Potential Molecular Dynamics Simulations of Ion-Enhanced Etching of Silicon by Atomic Chlorine"

; ;

Issue date: 2025

Rights:
Creative Commons Attribution 4.0 International (CC BY)

Cite as:

Kounis-Melas, Andreas, Panagiotopoulos, Athanassios, & Graves, David Barry. (2025). Data from "Deep Potential Molecular Dynamics Simulations of Ion-Enhanced Etching of Silicon by Atomic Chlorine" [Data set]. Version 1. Princeton University. https://doi.org/10.34770/zqj0-3z73

@electronic{kounismelas_andreas_2025,
  author      = {Kounis-Melas, Andreas and
                Panagiotopoulos, Athanassios and
                Graves, David Barry},
  title       = {{Data from "Deep Potential Molecular Dyna
                mics Simulations of Ion-Enhanced Etching
                 of Silicon by Atomic Chlorine"}},
  version     = 1,
  publisher   = {{Princeton University}},
  year        = 2025,
  url         = {https://doi.org/10.34770/zqj0-3z73}
}

: Description:

Data and input files related to the paper "Deep Potential Molecular Dynamics Simulations of Ion-Enhanced Etching of Silicon by Atomic Chlorine". The repository includes the final DeepMD model file used to perform simulations, the training data set used to train the model, LAMMPS input files to perform impact simulations, and data tables summarizing the results obtained in this study.
Show More

Filename	Size

Download from Globus

More about this record

Authors	Kounis-Melas, Andreas (Princeton University) Panagiotopoulos, Athanassios (Princeton University) Graves, David Barry (Princeton University)
Domains	Engineering
Communities	Princeton Plasma Physics Laboratory
Issue date	2025
Date Created	2025-07-01
Date Modified	2026-02-22
Version	1
URI	https://doi.org/10.34770/zqj0-3z73
Publisher	Princeton University
Type	Dataset
Funders	United States Department of Energy, DE-AC02-09CH11466 Samsung Electronics, IO 210224-08446-01 Onassis Foundation, F ZS 029-1/2022-2023
Show More